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Beilstein Arch. 2024, 202472. https://doi.org/10.3762/bxiv.2024.72.v1
Published 20 Dec 2024
We present Heterodyne Scanning Capacitance Microscopy (H-SCM) as a novel multi-frequency electrostatic force microscopy method for nanoscale capacitance characterization. Next to a high spatial resolution, the key advantage of the multi-frequency approach of H-SCM is that it allows for operation at almost arbitrary frequencies, enabling the measurement of the local dielectric function over a wide range of frequencies. We demonstrate the reliable operation of H-SCM using standard Atomic Force Microscopy (AFM) equipment plus an external lock-in amplifier up to a frequency of 5 MHz. Our results show a significant reduction of signal background, resulting in higher locality of the measurements with less cross-talk. Combined with improved models for the tip-sample capacity, H-SCM will pave the way for quantitative studies of dielectric effects in nanoscale systems in materials science, biology, and nanotechnology.
Keywords: Atomic force microscopy; capacity gradients; dielectric constant; dielectric spectroscopy; heterodyne frequency mixing; Kelvin Probe Force Microscopy; quantitative force spectroscopy; scanning capacitance microscopy; multi frequency AFM
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Rohrbeck, P. N.; Cavar, L. D.; Weber, F.; Reichel, P. G.; Niebling, M.; Weber, S. A. L. Beilstein Arch. 2024, 202472. doi:10.3762/bxiv.2024.72.v1
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